BAFS3000 GAS FLOW SENSOR
DESCRIPTION：
BAFS3000 series mass gas flow sensor is made of micro-electro-mechanical system (MEMS) flow sensor chip, which is suitable for clean, relatively dry, low-flow gas measurement and process control for various purposes. The unique packaging technology enables the product to meet different ranges of flow. measurement, ensuring high sensitivity, high reliability, high stability and low cost.Accurate flow signal is obtained, and the corresponding compensation algorithm is processed internally, so there is no need to do any external calibration compensation to ensure high-precision flow output;
CHARACTERISTICS：
High accuracy (1.5% F.S accuracy)
Linear output and no temperature compensation required
Long-term stability with minimal zero drift
Solid-state sensing core (no surface voids or fragile membranes), resistant to clogging and pressure shocks
Fast response time (1ms response time)
Wide flow range 0sccm -2000sccm
Able to adapt to relatively humid gas measurement
PREFORMANCE
Test Conditions
| VIN=12±0.01VDC，Ta=25°C
|
Relative humidity | 40％<相对湿度<60％
|
Temperature range | -25℃ ~+85℃
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Specification | 最小值 | 正常值
| 最大值
| 单位
| 备注
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Flow range | 0 | -
| 2500
| sccm | 可定制 |
Supply voltage | 8 | 12 | 24 | V |
|
Current | 20 |
| 15 | mA |
|
Zero voltage output | 0.98 | 1 | 1.02 |
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Precision
|
| 1.5
| 2 | %FS |
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Pressure resistance |
| 0.3 |
| MPa | 可定制 |
Resolution |
| 0.1 |
| % | 全量程 |
Response time
| 10
| 65
| 200 | ms
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Zero drift
|
| 0.2 |
| %Year | 全量程 |
temperature drift
|
|
| 4 | % | 0℃~50℃ |
Standard condition
| Air, 0℃, 101.325kPa |
| Overall material | Silicon carbide, epoxy, polyphenylene sulfide, FR4, silicon as sealing material
|
APPLICATION
Oxygen concentrators; respirators and respirators; nebulizers; continuous positive airway pressure (CPAP) equipment
Anesthesia delivery; leak detection; spectrometer; mass flow controller; communication system; environmental climate control
BAFS3000 mass gas flow sensor↓
BAFS3000 mass gas flow sensor S1.1.pdf
